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Suss MicroTec MA150e Mask Aligner Lithography system
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Advanced Roll-to-Roll Technology Co. Roll to Roll DC Molybdenum Sputter System
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EVG 150 fully automated resist processing system – Wafer Coater/Developer
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Siconnex Vertical 200 Solvent
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Leica INS 3300
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ASML XT 1250 DUV 193nm Scanner
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Suss MicroTec MA8/BA8 Mask Aligner Gen3
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190,000.00
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Nexx Apollo PVD
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AXCELIS GSD 200 E II
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STPS Multiplex ICP-DRIE
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SPTS Pegasus ICP DRIE
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Tel Synapse 3 tools: V Coater, V Bonder and Z Debonder
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Gallium Arsenide/ Gallium Nitride MOCVD tools
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KLA Aset F5X
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DAGE XD7600 NT X-RAY
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Aixtron Crius-R MOCVD
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AIXTRON AIX 2800 G5 HT MOCVD System
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ATC-2200-UHV
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Semitool / Applied Materials Raider TSV ECD Copper Electroplating with RTA
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DNS/ AMAT Sokudo RF-310A
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Tango Axcela 200 PVD tool
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0.00
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Sez SP203 Etcher
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Centrotherm C. Activator 150-50 Implant Activation & Anneal tool
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CNC FANUC Robodrill α-D21MiA and other tools
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AMAT PI 9500XR 150mm
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Tokyo Electron Alpha 8SE Vertical Furnace, DCS-HTO/TEOS
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OPTORUN OTFC1300 DBI Coating System
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Leybold APS 904 Evaporator
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KLA P16+ Surface profiler
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Buhler Leybold SYRUSpro 1510 E-beam coater
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