STS Pegasus Pro ICP-DRIE
- Electronics rack with
- MKS B-3013 Spectrum RF generator
- ENI RF generator
- Dual control panels
- MK2 Load Lock wafer holder
- Alcatel A100P vacuum pump
- Alcatel A100L vacuum pump
- SMC HRZ002-W-D chiller, ref HFC404a
- SMC HRZ001-L2-DY chiller, ref HFC134a
- Spare Shields
- EndPoint Detector
- Mag 2000 Turbo Pump Controller
- Control computer & LCD monitor and software
- Running Lithium Niobate wafers
- Typical gases SF6, O2, Helium, N2.
- Helium Back Side Cooling
Can buy as is in Good working condition or can be Refurbished with Install.
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