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300mm
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Leica INS 3300
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Tel Synapse 3 tools: V Coater, V Bonder and Z Debonder
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Tokyo Electron P12XLN
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Tel ACT 12 Inline track (1C 2D)
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VEECO (Bruker Nano), X-1D, AFM, 300mm VEECO (Bruker Nano), X-1D, AFM, 300mm
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VEECO (Bruker Nano), X-3D, AFM, 300mm VEECO (Bruker Nano), X-3D, AFM, 300mm
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VEECO (Bruker Nano), X-3D, AFM, 300mm VEECO (Bruker Nano), X-3D, AFM, 300mm
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MULTIPROBE APF II, Atomic Force Probe, 300mm MULTIPROBE APF II, Atomic Force Probe, 300mm
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MULTIPROBE MP1, Atomic Force Prober (AFP), 300mm MULTIPROBE MP1, Atomic Force Prober (AFP), 300mm
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Suss Microtec HVMMFT, Mold Fill Tool, 300mm, C4,
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KEITHLEY Insturments, 590 C-V Analyzer, 300mm KEITHLEY Insturments, 590 C-V Analyzer, 300mm
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HMI, eScan 320, 300mm, ebeam Inspection HMI, eScan 320, 300mm, ebeam Inspection
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AMAT Centura Rev.4 300mm
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TEL ACT 12 300mm
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Nikon S204B 300mm
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