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TOPCON WM-5000 8 2003
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Tel Act 12 Clean Track (1C2D) 12″
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Kokusai Electric Co., Ltd. Quixace II ALD High-k Vertical LPCVD Furnace
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Mazak Vertical CNC
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AMAT P5000 150
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TEL P-8XL 200 mm
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YOKOGAWA TS6000H(AL9740)
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Credence Sapphire Tester (with ESMO Hercules manipulator)
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LAM Research 2300 Exelan Flex – Chamber Only Dielectric Etch
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Metrologic Barcode Reader
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EBX-12C
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VARIAN EHP-500 200 mm
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NITTO M265N
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LEICA INS3000, SMIF 4219 200mm
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Nanometrics Inc. LYNX Critical Dimension (CD) Measurement (non SEM)
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Micromanipulator Probe Station
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DBM-403R
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KLA-Tencor SFS-7600 150mm
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HUGLE HS-8012 12 2006
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SEMILAB FAAST300 05-030330 300mm
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Risshi YR-8020SC Chiller/Heat Exchanger
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Mixer Direct 150 Gallon Tank
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AMAT P5000 (2CVD / 1 ETCH)
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WJ WJ 999R 150mm
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SHINKAWA UTC1000
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SHINKAWA UTC-1000 SUPER 200mm
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Standard Research Systems SR560 Low-noise voltage preamplifier Parts/Peripherals
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MovinCool Portable AC Unit
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LAM A4 TM(Alliance)
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Kokusai DD-802V-H 150mm
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ASYMTEK S-920
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SHINKAWA UTC-2000 SUPER 200mm
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Tokyo Electron Ltd. ALPHA-303i Anneal Vertical Anneal Furnace
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MTO Stereo Microscope
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PLASMATHERM 7300 PE(7000) (PECVD_PT#01)
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TEL Trias 300mm
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OLYMPUS SZ4045CHI 1999?2002
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Newport Stabilizer High Performance Laminar Flow Isolator Leg Set (2 legs) (24 1/2″ Height)
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Tokyo Electron Ltd. CLEAN TRACK LITHIUS i+ Multi Block (Resist Coater/Developer)
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Nabertherm Tube Furnace
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AUGUST AXI-S
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Ebara AA70W
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TSK RVF600A-X2 2003
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APPLIED MATERIALS INC 6200
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Tokyo Electron Ltd. TELFORMULA ALD High-K Vertical LPCVD Furnace
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