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IMADA DPX-5T
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Tokyo Electron Ltd. Trias Ti/TiN Metal CVD (Chemical Vapor Deposition)
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AXCELIS 200E 2 150mm
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Amerimade Plastic Cobalt Etch and P-Clean Bench
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MSP Particle Deposition
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5″ Transfer tool Used for LPCVD
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KEYENCE NR-2000
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Tokyo Electron Ltd. TELINDY Plus ALD High-K Vertical Furnace – Other
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FSI Mercury 150mm
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Therma-Wave Optiprobe 2690 DUV
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Multitest Handler
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American Optical – MICROSTAR/EPISTAR
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MALCOM PM-2C
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Tokyo Electron Ltd. CLEAN TRACK LITHIUS Multi Block (Resist Coater/Developer)
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Kokusai DJ-853V-8BL 8 inch
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