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SPTS Pegasus DRIE (Deep Reactive Ion Etch) Vintage 2008
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OPTORUN OTFC1300 DBI Coating System
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Applied Materials Centura ACP RP EPI
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Watkins Johnson TEOS 1500 CVD Tool (2 x units available)
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Varian VIISta PLAD
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Asm International Eagle-12-Rapidfire
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Applied Materials Producer SE APF (PECVD) 300mm
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Tango Axcela 200 PVD tool
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