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Etch/Ash/Clean - Plasma Processing
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Axcelis Radiantstrip 320 Stripper/Asher
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Yield Engineering R3 Plasma Cleaner w/ Power Source & Vac
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ANATECH P600 PLASMA CLEANER
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TEL TE-8401Dry Etcher
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Hitachi M-602A
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Hitachi M-501A Etcher (2 x sets)
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Canon Anelva ILD 4100 SR
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SPTS Pegasus DRIE (Deep Reactive Ion Etch) Vintage 2008
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FSI Excalibur Anhydrous HF Vapor Etcher
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AXCELIS TECHNOLOGIES INC. GEMINI GES AIM (STRIPPER/ASHER)
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Applied Materials Producer Etch (Dielectric Etch)
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GaSonics International PEP 3510+ (PEP3510A)
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AMAT Centura 5200
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Novellus C1 200 TEOS (CONCEPT ONE-200)
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TEL (Tokyo Electron Ltd) Telius SP-305 SCCM
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